Control of Microstructure and Texture in Nanocrystalline Transition Metal Nitride Coatings by Ion-Beam-Assisted Deposition

Conference paper

C.-H. Ma, J.-H. Huang and Haydn Chen

30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films

2003

Abstract

Control;Microstructure;Texture;Nanocrystalline Transition Metal Nitride Coatings;Ion-Beam-Assisted Deposition

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Title: Control of Microstructure and Texture in Nanocrystalline Transition Metal Nitride Coatings by Ion-Beam-Assisted Deposition
Creators - without role: C.-H. Ma
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Haydn Chen
Publication Details: 30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957770267606774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper