Control of Preferred Orientations of TiN and ZrN Thin Films by Thin Film Templates

Conference paper

Y.Y. Cheng, J.-H. Huang and G.-P. Yu

35th International Conference on Metallurgical Coatings and Thin Films 35th International Conference on Metallurgical Coatings and Thin Films

2008

Abstract

Control;Preferred Orientations;TiN;ZrN;Thin Films;Thin Film Templates

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Title: Control of Preferred Orientations of TiN and ZrN Thin Films by Thin Film Templates
Creators - without role: Y.Y. Cheng
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
G.-P. Yu
Publication Details: 35th International Conference on Metallurgical Coatings and Thin Films 35th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957772930306774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper