- Title
- Controlling the orientation of nano-twined Cu thin film deposited by unbalanced magnetron (UBM) sputtering
- Translated title
- Controlling the orientation of nano-twined Cu thin film deposited by unbalanced magnetron (UBM) sputtering.
- Creators - without role
- Hsin-Yuan ChenFan-Yi Ouyang - 國立清華大學原子科學院工程與系統科學系
- Publication Details
- TACT 2013 International Thin Films Conference
- Identifiers
- 9957773172806774
- Academic Unit
- Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Controlling the orientation of nano-twined Cu thin film deposited by unbalanced magnetron (UBM) sputtering
TACT 2013 International Thin Films Conference
2013
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