Curing Process Window for MSQ Based Low-k Dielectrics

Conference paper

Tsu-Jen Chou, Shou-Yi Chang, Ying-Her Chen, Sheng-Nang Lee, Syun-Ming Jang, Chen-Hua Yu and Mong-Song Liang

Advanced Metallization Conference 2002: 12th Asian Session Advanced Metallization Conference 2002: 12th Asian Session, Vol.18

2002

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Title: Curing Process Window for MSQ Based Low-k Dielectrics
Creators - without role: Tsu-Jen Chou
Shou-Yi Chang - 國立清華大學工學院材料科學工程學系
Ying-Her Chen
Sheng-Nang Lee
Syun-Ming Jang
Chen-Hua Yu
Mong-Song Liang
Publication Details: Advanced Metallization Conference 2002: 12th Asian Session Advanced Metallization Conference 2002: 12th Asian Session, Vol.18
Identifiers: 9957769830306774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper