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DEFECTS IN GaAs AND Al//xGa//1// minus //xAs GROWN BY MBE.
Conference paper

DEFECTS IN GaAs AND Al//xGa//1// minus //xAs GROWN BY MBE.

C.Y. Chang, K.Y. Cheng, Y.H. Wang, W.C. Liu and S.A. Liao
Electrochemical Society Extended Abstracts, Vol.84-2, pp.644-645
1984

Abstract

Engineering (all)
Molecular Beam Epitaxy (MBE) is rapidly becoming a practical and economical epitaxy growth technology for opto-electronic and microwave devices. However, some morphologic defect problems such as whisker, oval defect and polycrystalline growth still remain to be solved. Simple precautions were used to eliminate the defect density.

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