Abstract
We developed a nanofluidic analytical system using multiple nanochannel open/close valves for ultra-small and high-sensitivity immunoassay. Previously, we have developed a nanochannel open/close valve, but analytical application had not been achieved, which leaves the fluid control in nanofluidic devices extremely difficult. Herein, we developed a fluid control system implemented with piezoelectric actuators for multiple valve operation combined with a detector. Seven valves were fabricated and independently operated for demonstrating ELISA. The system operation was verified by confirming fluid operations such as sampling and flow switching using the valves, and consequently detecting 1,500 protein molecules.