Data-driven approaches for process simulation and optical proximity correction

Conference paper

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Hao-Chiang Shao, 嘉文林 and Shao-Yun Fang

Proceedings of Asia and South Pacific Design Automation Conference

01/2023

Abstract

electronic design automation;deep learning;lithography simulation;computer vision

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Title: Data-driven approaches for process simulation and optical proximity correction
Creators - without role: Hao-Chiang Shao
嘉文林
Shao-Yun Fang
Identifiers: 9957777751706774
Academic Unit: Institute of Communications Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Proceedings of Asia and South Pacific Design Automation Conference