Deposition of  (Ti,Al)N Films onto Tool Steel by Reactive R.F. Magnetron Sputtering

Conference paper

C.T. Huang and J.G. Duh

Society of Vacuum Coaters 37th Annual Technical Conference Society of Vacuum Coaters 37th Annual Technical Conference

1994

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Title: Deposition of (Ti,Al)N Films onto Tool Steel by Reactive R.F. Magnetron Sputtering
Creators - without role: C.T. Huang
J.G. Duh - 國立清華大學工學院材料科學工程學系
Identifiers: 9957767077706774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: Society of Vacuum Coaters 37th Annual Technical Conference Society of Vacuum Coaters 37th Annual Technical Conference