Deposition of TiN Thin Films on Si(100) by Unbalanced Magnetron Sputtering

Conference paper

29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films

2002

Abstract

Deposition;TiN Thin Films;Si(100);Unbalanced Magnetron Sputtering

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Title: Deposition of TiN Thin Films on Si(100) by Unbalanced Magnetron Sputtering
Creators - without role: Wen-Jun Chou
Ge-Ping Yu
Jia-Hong Huang - 國立清華大學原子科學院工程與系統科學系
Publication Details: 29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957770086406774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper