Design and Fabrication of Integrated Optical Phase Modulators by Micro-Electro- Mechanical-System (MEMS) Actuators

Conference paper

Chun-Che Chang, Tzu-Hsin Chen, Jiun-Ming Wu, Hung-Sheng Hsieh, Jia-Min Shieh, Wei-Chao Chiou and Ming-Chang M. Lee

The 17th symposium on Nanodevice Technology

2010

Abstract

Modulators;Micro-Electro- Mechanical-System (MEMS)

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Title: Design and Fabrication of Integrated Optical Phase Modulators by Micro-Electro- Mechanical-System (MEMS) Actuators
Creators - without role: Chun-Che Chang
Tzu-Hsin Chen
Jiun-Ming Wu
Hung-Sheng Hsieh
Jia-Min Shieh
Wei-Chao Chiou
Ming-Chang M. Lee - 國立清華大學電機資訊學院電機工程學系
Publication Details: The 17th symposium on Nanodevice Technology
Identifiers: 9957773609406774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper