Logo image
Back
Design and Fabrication of Micro-LED Display with Sapphire Micro-Reflector Array
Conference paper

Design and Fabrication of Micro-LED Display with Sapphire Micro-Reflector Array

Chengshiun Liou, Mingyu Hsieh, Fuchi Shih, Yuanyuan Huang, Zihsong Hu, Chingfu Tsou and Weileun Fang
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2020-January, pp.1153-1156
01/2020
DOI: https://doi.org/10.1109/MEMS46641.2020.9056340
Appears in  keyword about Physics

Abstract

dry etching Micro-LED display microloading sapphire micro-reflector Electronic Optical and Magnetic Materials Condensed Matter Physics Mechanical Engineering Electrical and Electronic Engineering
This paper proposes a new design of a Micro-LED display with a sapphire micro-reflector array. This novel technology uses an ICP etching process to fabricate a V-shaped trench in sapphire substrate. With the microloading effect, a specific sapphire micro-reflector is created under each Micro-LED, which can be used to converge the light rays and therefore, improve the display quality of a Micro-LED. In this study, the feasibility of a sapphire and GaN etching process and the optical performance of a Micro-LED have been evaluated and measured by experimentation. It was confirmed that the proposed Micro-LED display has an improved lighting performance, while increasing 55% in maximum brightness.

Metrics

1 Record Views

Details

Logo image