Design and Fabrication of a Micro/Nano Probe and Its Characterization by AFM

Conference paper

Shang-Ren Chang, 國賓李, Chi-Han Chiou and Huei-Huang Lee

The 27th Conference on Theoretical and Applied Mechanics

2003

Abstract

Design and Fabrication of a Micro/Nano Probe and I

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Title: Design and Fabrication of a Micro/Nano Probe and Its Characterization by AFM
Translated title: Design and Fabrication of a Micro/Nano Probe and Its Characterization by AFM
Creators - without role: Shang-Ren Chang
國賓李
Chi-Han Chiou
Huei-Huang Lee
Publication Details: The 27th Conference on Theoretical and Applied Mechanics
Identifiers: 9957774842006774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper