Abstract
This paper presents a passive LC resonant pressure sensor fabricated and packaged in biocompatible Ormocomp. The applied pressure changes the sensing cavity gap and thus the LC resonance frequency of the sensor. The fabrication and packaging processes based on casting and lamination were demonstrated. The measured resonance frequency and sensitivity were 477 MHz and 74 kHz/kPa, respectively. Cytocompatibility tests showed that the packaged device was water tight and not toxic to cells during a two-day cell culture.