- Title
- Design and Implementation of Remote Plasma Sources for Semiconductor Chamber Cleaning
- Creators - without role
- 財福 吳
- Publication Details
- 2020 IEEE Energy Conversion Congress and Exposition (ECCE)
- Identifiers
- 9957772557406774
- Academic Unit
- Department of Electrical Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Design and Implementation of Remote Plasma Sources for Semiconductor Chamber Cleaning
2020 IEEE Energy Conversion Congress and Exposition (ECCE)
10/2020
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