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Design and fabrication of a cmos compatible thermoelectric infrared sensor
Conference paper

Design and fabrication of a cmos compatible thermoelectric infrared sensor

N.-C. Chen, J.-M. Chung and R. Chen
Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008) Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2008)
2008

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