Abstract
Here we present the current status of our microfabricated SU-8 cantilever beam scanner for endoscopic examination. The current design has improved performance with the implementation of a MEMS based push-pull actuator. Fabrication of the SU-8 rib waveguide was measured to be -5.0μm as compared to -50μm in the previous design, further improves our spatial resolution. We have made it easier to couple an optical fiber into the device and achieved -98% coupling efficiency by altering the system geometry. The proposed rib waveguide design also allows a relatively large waveguide cross section (4μm in height and 55μm in width) and broader band single mode operation (λ= 0.7μm to 1.3μm) with a minimum transmission loss (85% output transmission efficiency with Gaussian beam profile input). Our design provides a new means to create a 2-D raster scanning pattern, verified by transient finite element analysis (FEA). The scanner's line resolution and field of view (FOV) have been optimized through a parametric study using modal and harmonic analyses. This paper describes the fabrication and testing of our optical scanner, which may find application in the area of endoscopy, where there is a need for a minimally invasive device that reduces patient discomfort. © 2012 SPIE.