Abstract
In this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2-6 microns and lattice constant of 30-50 microns. These metamaterials will exhibit magnetic response at 0.5-2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.