Design of a 3-axis MEMS gyroscope based on a fully differential operation

Conference paper

K.-J. Tseng, Y.-H. Huang, M.-H. Li and S.-S. Li

Proceeding, Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT)

06/2018

Abstract

3-axis;MEMS gyroscope

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Title: Design of a 3-axis MEMS gyroscope based on a fully differential operation
Translated title: Design of a 3-axis MEMS gyroscope based on a fully differential operation
Creators - without role: K.-J. Tseng
Y.-H. Huang
M.-H. Li
S.-S. Li
Publication Details: Proceeding, Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT)
Identifiers: 9957773582806774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper