Abstract
This study presents a novel piezoelectric thin film driven bi-axial MEMS scanning mirror in Fig. 1. Design features of the proposed device include: (1) Tri-gimbal structure (Fig. 1a-b): by exploiting the middle-gimbal structure to prevent the coupling of the modes in two orthogonal axes so as to achieve straight edges of scanning pattern; (2) Curve-tapered actuators with desired electrodes distribution and routing (Fig. 1c-d): to act as the torque generator on torsional-spring to enlarge the scan angle and also restrain the unwanted plate modes. The miniaturized scanner with mirror of 1.2mm diameter was realized in 6×6mm 2 chip size. Under resonant driving (no vacuum required), the presented scanner has 59.7° horizontal scanning angle at 6.5kHz and 7.8° vertical scanning angle at 16kHz. The 2-axis scanning pattern has straight edges showing good decoupling of the middle-gimbal design.