Abstract
A new lead-zirconium-titan ate (PZT) actuated scanning light source design is proposed. An Aerosol deposition process will be used to construct a high quality 5 &null thick film of PZT. The PZT actuator will induce non-linear vibrations to scan an area with a cantilever waveguide. The fabrication procedure for the design is presented. Fabrication results are discussed. A finite element analysis of the actuator pad is also presented. Fabrication steps needed for a comparison of the amplitude of actuation, resolution, and frequency of scan with previously developed Si based devices are also discussed.