Developing Defect Diagnosis Methods for Semiconductor Manufacturing and Their Empirical Studies in a Wafer Fab

Conference paper

Chen-Fu Chien, S. Hsu, S. Peng and D. Lin

the Chinese Institute of Industrial Engineers National Conference 1999. the Chinese Institute of Industrial Engineers National Conference 1999.

1999

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Title: Developing Defect Diagnosis Methods for Semiconductor Manufacturing and Their Empirical Studies in a Wafer Fab
Creators - without role: Chen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
S. Hsu
S. Peng
D. Lin
Publication Details: the Chinese Institute of Industrial Engineers National Conference 1999. the Chinese Institute of Industrial Engineers National Conference 1999.
Identifiers: 9957769191106774
Academic Unit: Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper