Development and realization of a Fl-switching valve in extended-nano space utilizing glass deformation properties at the nanometer scale

We report on realization of a fL-switching valve based on an extended-nano channel (ENC) utilizing glass deformation properties. A tiny deformation of glass by the precise actuator control system can lead to an open/closed state of ENC because of its smallness, even if we use a tough glass material. Here we are demonstrating a new concept of a hemispherical valve chamber, its fabrication method, and the valve proof of principle.