Development of a Surface-Micromachined Pressure Sensor on a Flexible Substrate

Conference paper

J. J. Miau, 國賓李, C Y. Wei, Y. F. Gai, Y. C. Lin, J. H. Chou and H. C. Wu

The 3rd Nano Engineering and Micro System Technology Workshop

1999

Abstract

Development of a Surface-Micromachined Pressure Se

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Title: Development of a Surface-Micromachined Pressure Sensor on a Flexible Substrate
Translated title: Development of a Surface-Micromachined Pressure Sensor on a Flexible Substrate
Creators - without role: J. J. Miau
國賓李
C Y. Wei
Y. F. Gai
Y. C. Lin
J. H. Chou
H. C. Wu
Publication Details: The 3rd Nano Engineering and Micro System Technology Workshop
Identifiers: 9957767244306774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper