Abstract
This study demonstrates the design, fabrication and characteristics of a novel dual-axis microstage. The stage is supported by curved-beam springs and driven by two Lorentz force actuators. By modulating the magnitude and direction of these two actuators, the stage can perform 2-axis in-plane motions. The microstage has two merits: (1) Lorentz force actuator with thermal buckling characteristic to enlarge the microstage displacement, (2) curved-beam spring to enable the 2-axis positioning. The typical microstage has a planar size of 3mmx3mm with output displacements of ±13 μm in X and Y-axis. © 2011 Published by Elsevier Ltd.