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Development of a novel polymeric waveguide and micro actuator for micro scanning system
Conference paper

Development of a novel polymeric waveguide and micro actuator for micro scanning system

Wei-Shu Hua, Wei-Chih Wang and Wen-Jong Wu
19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008, pp.84-93
2008

Abstract

Aerosol deposition method MEMS Polymeric waveguide Scanning system SU-8 Aerospace Engineering Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications
The main thrust of this paper is to eventually develop a fully integrated polymeric cantilever scanner for a far field endoscopic imaging application. The new technique deploys scanning instead of fiber bundle to capture optical image. In this paper, we present work on an integrated actuator system using an aerosol deposition of PZT thick film for the vertical actuator on a 1-D optical scanner system. Discussed here is the mechanical and optical design analysis for the resonating waveguide structure. In addition, a summary of the fabrication processes for the 1-D scanning device is provided. Lastly, experimental results of some preliminary mechanical and optical performance are shown.

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