Abstract
Piezo devices made of lead-zirconium-titanate (PZT) are known for driving mechanical device for positioning control and vibration actuation. Here we present a new rapid prototyped PZT actuator for potential 2D scanner application. The proposed 5-μm thick film PZT actuator is made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear vibration and frequency response. Fabrication results, electrical impedance and mechanical response will be presented and discussed.