- Title
- Diagnosing Abnormal WAT Problems by Applying an Effective Data Mining Framework
- Creators - without role
- S. HsuChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系
- Publication Details
- 3rd Modeling and Analysis of Semiconductor Manufacturing Conference 3rd Modeling and Analysis of Semiconductor Manufacturing Conference, pp.365-372
- Identifiers
- 9957768268106774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Diagnosing Abnormal WAT Problems by Applying an Effective Data Mining Framework
3rd Modeling and Analysis of Semiconductor Manufacturing Conference 3rd Modeling and Analysis of Semiconductor Manufacturing Conference, pp.365-372
2005
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