- Title
- Diamond Film Growth by 60-KW Microwave Plasma Enhanced CVD Method and Polished by Chemical-Assisted Mechanical Polishing Method
- Creators - without role
- 宏營 蔡
- Publication Details
- 14th European Conference on Diamond, Diamond-Like Materials
- Identifiers
- 9957768532106774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Diamond Film Growth by 60-KW Microwave Plasma Enhanced CVD Method and Polished by Chemical-Assisted Mechanical Polishing Method
14th European Conference on Diamond, Diamond-Like Materials
2003
Related links
Metrics
1 Record Views