Differentially Driven Dual-Electrode Air-Coupled AlN PMUTs with Enhanced Transmission Efficiency

Conference paper

C.-Y. Chou and 昇憲李

IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings

2024

Abstract

AlN;Differential;PMUTs;Rangefinders;SPL

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Title: Differentially Driven Dual-Electrode Air-Coupled AlN PMUTs with Enhanced Transmission Efficiency
Creators - without role: C.-Y. Chou - National Tsing Hua University
昇憲李
Publication Details: IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, UFFC-JS 2024 - Proceedings
Identifiers: 9957768892906774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper