Abstract
This paper presents a digital pressure-control scheme that can be readily integrated into micro-fluidic chips. A hybrid PMMA/PDMS microstructure with an elastic diaphragm sandwiched between input and reference pressures is utilized to filter out fluctuation and realize a steady pressure output. The reference pressure, which is set by a serial D/A pressure converter [1], is used to guide the output pressure and switched between levels on demand. To fabricate the desired 3D-structures, a DLP-SLA process is developed, which prints PMMA parts and molds for PDMS duplication. The on-chip pressure controllers can replace their bulky/costly counterparts, which are crucial for microfluidics.