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Digitally-specified micromechanical displacement amplifiers
Conference paper

Digitally-specified micromechanical displacement amplifiers

Yang Lin, Wei-Chang Li, Ilya Gurin, Sheng-Shian Li, Yu-Wei Lin, Zeying Ren, Bongsang Kim and Clark T.-C. Nguyen
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.781-784
2009

Abstract

Displacement amplifier Micromechanical devices Power amplifier Power converter Radial-contour mode Resonant switch Resonator RF MEMS
A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method of [1], this displacement gain circuit is a key enabler for resoswitch-based mechanical power amplifiers and power converters, because it can prevent unwanted drive electrode-to-resonator impact in such circuits. This design, however, differs from that of [1] in that 1) it can be applied to radial-contour mode disks that can achieve much higher frequency than the wine-glass disks of [1]; 2) it preserves the frequency and Q of its constituent resonators (whereas the method of [1] changed the frequency and lowered the Q); and 3) its digital method for gain specification is much more straightforward, accurate, and repeatable. ©2009 IEEE.

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