摘要
This paper reports an experimental study and decoupled analysis of support transducer topology-based thin-film piezoelectric on substrate (TPoS) architecture to examine the energy confinement characteristics at resonance. We recorded a high-Quality factor (Q) of 60,688 at 65 MHz at 300K for the coupled resonator topology with Aluminum Nitride (AlN) as piezoelectric material. This coupled resonator scheme exhibits a similar to 60 times Q enhancement compared to the standalone resonator since a higher percentage of energy is stored in the higher order mode high-Q resonant tank. The coupled resonator topology exhibits a Q of 83,548 in the damping characteristics study done at cryogenic temperature.