Effect of  Film Thickness on the Structure and Properties of ZrN Thin Films Deposited on AISI 316 Stainless Steel by Ion Plating

Conference paper

H.C. Yang, G.P. Yu and J.-H. Huang

30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films

2003

Abstract

Effect;Film Thickness;Structure;Properties;ZrN Thin Films;AISI 316 Stainless Steel;Ion Plating

1 Record Views

Title: Effect of Film Thickness on the Structure and Properties of ZrN Thin Films Deposited on AISI 316 Stainless Steel by Ion Plating
Creators - without role: H.C. Yang
G.P. Yu
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
Publication Details: 30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957776799506774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper