Effect of Heat Treatment on the Mechanical Properties of Ion-Plated TiN Film

Conference paper

29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films

2002

Abstract

Effect;Heat Treatment;Mechanical Properties;Ion-Plated TiN Film

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Title: Effect of Heat Treatment on the Mechanical Properties of Ion-Plated TiN Film
Creators - without role: Wen-Jun Chou
Ge-Ping Yu
Jia-Hong Huang - 國立清華大學原子科學院工程與系統科學系
Publication Details: 29th International Conference on Metallurgical Coatings and Thin Films 29th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957768641206774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper