Effect of Oxygen Flow Rate on the Structure and Properties of Nanocrystalline Zr(N,O) Thin Films Deposited by Ion Plating

Conference paper

J.-H. Huang, K.H. Chang and G.-P. Yu

33th International Conference on Metallurgical Coatings and Thin Films 33th International Conference on Metallurgical Coatings and Thin Films

2006

Abstract

Effect;Oxygen Flow Rate;Structure;Properties;Nanocrystalline Zr(N,O) Thin Films;Ion Plating

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Title: Effect of Oxygen Flow Rate on the Structure and Properties of Nanocrystalline Zr(N,O) Thin Films Deposited by Ion Plating
Creators - without role: J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
K.H. Chang
G.-P. Yu
Identifiers: 9957770092506774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 33th International Conference on Metallurgical Coatings and Thin Films 33th International Conference on Metallurgical Coatings and Thin Films