- Title
- Effect of Residual Stress on Mechanical Properties and Interface Adhesion Strength of SiN Thin Films
- Creators - without role
- Shou-Yi Chang - 國立清華大學工學院材料科學工程學系Yi-Chung HuangChih-Hsiang Chang
- Identifiers
- 9957777710906774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- Proceedings of ThinFilms 2008 Proceedings of ThinFilms 2008
Conference paper
Effect of Residual Stress on Mechanical Properties and Interface Adhesion Strength of SiN Thin Films
Proceedings of ThinFilms 2008 Proceedings of ThinFilms 2008
2008
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