- Title
- Effect of Substrate Temperature on TiN Thin Films Deposited by HCD Ion Plating
- Creators - without role
- C.T. ChenG.P. YuJ.H. Huang - 國立清華大學原子科學院工程與系統科學系
- Identifiers
- 9957771242806774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- Proceedings of the 1995 Annual Conference of the Chinese Society for Materials Science Proceedings of the 1995 Annual Conference of the Chinese Society for Materials Science, pp.254-255
Conference paper
Effect of Substrate Temperature on TiN Thin Films Deposited by HCD Ion Plating
Proceedings of the 1995 Annual Conference of the Chinese Society for Materials Science Proceedings of the 1995 Annual Conference of the Chinese Society for Materials Science, pp.254-255
1995
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