Effect of Thermal Treatment on Material and Mechanical Properties of Si/SiGe multi-layer Films

Conference paper

L. H. Peng, J. S. Lin, C. P. Chou and W. F. Wu

Symposium on Nano Device Technology Symposium on Nano Device Technology

2011

Abstract

Thermal Treatment;Si/SiGe multi-layer Films

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Title: Effect of Thermal Treatment on Material and Mechanical Properties of Si/SiGe multi-layer Films
Creators - without role: L. H. Peng
J. S. Lin
C. P. Chou
W. F. Wu - 國立清華大學原子科學院工程與系統科學系
Identifiers: 9957775526106774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: Symposium on Nano Device Technology Symposium on Nano Device Technology