Effect of Thickness on the Structure and Properties of Nanocrystalline Zirconium Nitride Thin Film by Unbalanced Magnetron Sputtering

Conference paper

S.M. Tung, J.-H. Huang and G.P. Yu

30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films

2003

Abstract

Effect;Thickness;Structure;Properties;Nanocrystalline Zirconium Nitride Thin Film;Unbalanced Magnetron Sputtering

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Title: Effect of Thickness on the Structure and Properties of Nanocrystalline Zirconium Nitride Thin Film by Unbalanced Magnetron Sputtering
Creators - without role: S.M. Tung
J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
G.P. Yu
Publication Details: 30th International Conference on Metallurgical Coatings and Thin Films 30th International Conference on Metallurgical Coatings and Thin Films
Identifiers: 9957772409006774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper