- Title
- Effect of Volumetric Shrinkage in Nanoimprint Lithography
- Creators - without role
- 宏營 蔡
- Identifiers
- 9957770035806774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
- Publication Details
- 2nd International Conference on Nanoimprint and Nanoprint Technology
Conference paper
Effect of Volumetric Shrinkage in Nanoimprint Lithography
2nd International Conference on Nanoimprint and Nanoprint Technology
2003
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