Abstract
The titanium interlayer effects on the growth of carbon nanotubes on silicon were investigated using different catalysts such as palladium, nickel and cobalt. Microwave-heated chemical vapor deposition method was used to fabricate the carbon nanotubes. It was observed that the use of nickel and cobalt as catalysts on Ti-coated silicon during the growth could produce well aligned carbon nanotubes. The results show that the due to better adhesion to Si, CNT exhibit lower turn-on fields and higher attainable maximum emission current.