- Title
- Effects of crystalline SiNx layers on the microstructures and mechanical properties of multilayered TiAlN/SiNx coatings
- Creators - without role
- Y.C. ChanJ.G. Duh - 國立清華大學工學院材料科學工程學系
- Publication Details
- TACT 2009 International Thin Films Conference TACT 2009 International Thin Films Conference
- Identifiers
- 9957777728506774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Effects of crystalline SiNx layers on the microstructures and mechanical properties of multilayered TiAlN/SiNx coatings
TACT 2009 International Thin Films Conference TACT 2009 International Thin Films Conference
2009
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