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Effects of laser sources on the reverse-bias leakages of laser lift-off GaN-based leds
Conference paper

Effects of laser sources on the reverse-bias leakages of laser lift-off GaN-based leds

Ji-Hao Cheng, Wei Chih Peng, YewChung Sermon Wu and Hao Ouyang
ECS Transactions, Vol.6(2), pp.285-287
2007

Abstract

The KrF pulsed excimer laser (248 nm) and the frequency-tripled Nd YAG laser (355nm) were used to separate GaN thin films from sapphire substrates. The effect of these two laser sources on the reverse-bias leakages of InGaN-GaN light-emitting diodes (LEDs) were studied. © The Electrochemical Society.

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