Electrical Properties Measurement of the EWOD Microfluidic Device Based on LPCVD Si3N4 Dielectric Layer

Conference paper

Hsien-Hua Shen and Da-Jen Yao

8th Annual IEEE International conference on Nano/Molecular Medicine and Engineering (IEEE-Nanomed 2014)

11/2014

Abstract

EWOD;Microfluidic;LPCVD

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Title: Electrical Properties Measurement of the EWOD Microfluidic Device Based on LPCVD Si3N4 Dielectric Layer
Creators - without role: Hsien-Hua Shen
Da-Jen Yao
Publication Details: 8th Annual IEEE International conference on Nano/Molecular Medicine and Engineering (IEEE-Nanomed 2014)
Identifiers: 9957770618406774
Academic Unit: Department of Physical Education, Hsinchu Teachers College, National Tsing Hua University
Language: English
Resource Type: Conference paper