Abstract
The RF junction varactors are employed as electro-static discharge (ESD) protection devices and co-designed with 60 GHz low-noise amplifier (LNA) fabricated in a 65-nm CMOS technology. The junction varactor acts as an ESD diode to bypass ESD current during ESD zapping, and also utilized as a capacitor to be a part of input matching network of the LNA in normal RF operation. By transmission line pulse (TLP) measurement, the ESD protection capabilities of RF junction varactors are characterized with different device parameters. The experimental results demonstrate excellent second breakdown currents (It2) and high ratios of the ESD levels to parasitic capacitances (VESD=CESD). With ESD/matching co-design methodology, the ESD-protected LNA demonstrates a second breakdown current It2 of 1.4 A, corresponding to a 2-kV human-body-model (HBM) ESD protection level with a noise figure (NF) of 6.6 dB and a peak gain of 16.5 dB at 60 GHz under a power consumption of only 28mW. © 2013 The Japan Society of Applied Physics.