Abstract
In this paper we demonstrate a gas-phase process to fabricate Ag nanoparticles-based bio-sensing devices. Ag nanoparticles, prepared from the gas phase through spray pyrolysis, are size-selected via electrostatic classification. These size-selected nanoparticles are then successfully attracted and aligned onto an electrostatic-patterned biased P-N junction substrate to form high-resolution nanoparticle patterns. Particles in the size range of 30-100 nm were evaluated. Our approach provides a promising tool for precise assembly of nanoparticles for future device applications. © 2007 Materials Research Society.