Enhanced Measurement Technique for Lens Centering Error with Power Analysis and Su bwavelength Grating-Patterned Prism Module

This study presents a technique for accurately measuring the centering error of a lens. The proposed technique int egrates power analysis, employing a prism module patterned with a subwavelength grating, in conjunction with a reflection-centering system utilizing the −1st-order rays at 5 mW and 650 nm. By leveraging Snell's law and diffra ctive characteristics, the centering error is thoroughly tested and analyzed using a power meter. Compared to the conventional autocollimation-based centering error measuring system, the proposed technique demonstrates a fourfol d amplification in the resolution of optical centering error within the system. The introduced technique in this stud y enhances instrument sensitivity by exploiting variations in the direction and energy of light.