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Epitaxial Lateral Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array
Conference paper

Epitaxial Lateral Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array

H. M. Ku, C. Y. Huang, C. Z. Liao and S. Chao
International Conference on Solid State Devices and Materials
2010

Abstract

Epitaxial Lateral;Overgrowth;Gallium Nitride;Embedding;Micro-Mirror Array

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