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Evaluation of Interface Adhesion of Thin Film Layers by Four-Point Bending Test
Conference paper

Evaluation of Interface Adhesion of Thin Film Layers by Four-Point Bending Test

Shou-Yi Chang, Su-Jien Lin, Syun-Ming Jang, Chen-Hua Yu and Mong-Song Liang
MRS Proceedings, vol. 18, Advanced Metallization Conference 2002 Advanced Metallization Conference 2002
2002

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