Excellent field emission from carbon nanotubes grown by microwave-heated chemical vapor deposition

J.H. Huang; C.C. Chuang; C.H. Tsai; W.J. Chen

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Excellent field emission from carbon nanotubes grown by microwave-heated chemical vapor deposition

J.H. Huang, C.C. Chuang, C.H. Tsai and W.J. Chen

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.21(4), pp.1655-1659

07/2003

Appears in keyword about Physics

Abstract

Condensed Matter Physics

Electrical and Electronic Engineering

The effect of Ni thickness, growth temperature, and types of substrates on the growth of carbon nanotubes (CNT) was studied using microwave-heated chemical vapor deposition. The diameter and length of CNTs increased with the thickness of nickel films and applied microwave power. A CNT emitter grown on 80-nm-thick Ni at 900 W for 18 min showed an emission characteristic with turn-on field of 0.056 V/μm and current density of 160 mA/cm ² at 4.5 V/μm.

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Title: Excellent field emission from carbon nanotubes grown by microwave-heated chemical vapor deposition
Creators - without role: J.H. Huang - Dept. of Mat. Sci. and Engineering , National Tsing Hua University
C.C. Chuang - Dept. of Mat. Sci. and Engineering , National Tsing Hua University
C.H. Tsai - Dept. of Mat. Sci. and Engineering , National Tsing Hua University
W.J. Chen - Dept. of Mech. Materials Engineering , Natl. Huwei Institute of Technology
Identifiers: 9957773346306774
Academic Unit: National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.21(4), pp.1655-1659

Excellent field emission from carbon nanotubes grown by microwave-heated chemical vapor deposition

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